three-temperature zone tube furnace CVD system

Model：KJ-TCVD1600-L80LB3W

Description：

This is a CE-certified three-temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a double-rotary mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature o

Brief Introduction
This is a CE-certified three-temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a double-rotary mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature of this furnace can reach 1600℃, and the vacuum degree can reach 10pa.
Main Features
1. The heating element is made of high-quality MoSi2, and the furnace is made of ceramic fiber material, which has good thermal insulation performance, durability, high tensile strength, no miscellaneous balls, high purity, and energy-saving effect is obviously better than that of domestic fiber materials. 2. Over temperature alarm and power off, leakage protection, safe and reliable operation. 3. Independent temperature controller. 30-level programmable temperature.
Heating System(Tube Furnace)
Max. temperature	1700 ℃
Working temperature	1600℃
Display	LED display
Tube size	80mm(OD)
Tube Material	High Quality alumina tube
Hot zone length	220+220+220mm(There will be a gap between each zones)
Heating Element	MoSi2
Heating rate	0-5℃/min
Temperature control	● PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. ● 30 programmable segments for precise control of heating rate, cooling rate and dwell time. ● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection. ● Over temperature protection and alarm allows for operation without attendant.
Thermocouple	3pcs thermocouple(Both measurement & temperature control function) located in the middle of the each hot zones(out side the tube) 1pcs thermocouple(Only measure the temperature) located inside the tube.
Temperature accuracy	±1℃
Furnace structure	Double layer steel casing with dual cooling fan, temperature of furnace shell below 60^oC. Non-Splitable door design.
Vacuum Flange	Stainless Steel vacuum flange with valve.
Working voltage	220V 50Hz
Max. Power	6KW
Certification	CE
Gas System
4 Channel Mass Flow Meter	Four precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Control range from 0~200 sccm MFC3: Control range from 0-500sccm MFC4: Control range from 0~200 sccm (or according to your requirement) One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing.
Vacuum Pump +Vacuum Gauge System
Vacuum Pump+Vacuum Gauge	Equipped with rotary vane pump which makes the vacuum Rate can reach 10Pa(Cool State)
Warranty
Certificate	CE
Warranty	One-year limited warranty with life time support. (Consumable parts such as heater and crucibles are not covered by the warranty, please order the replacement at related products)
Free technical support	Lifetime